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There is NO meeting in December

Date: January 08, 2018

5:30pm: Networking/light dinner
6:30pm: Presentation
7:45pm: Adjourn

Water and soft drinks are free. Food is available for a small fee.

Location: 7layers

Title

The case for measurement and analysis of ESD fields in semi-conductor manufacturing

Speaker

Timothy Maloney

Abstract

A destructive Charged Device Model electrostatic discharge event can happen in semiconductor manufacturing and should be detectable from radiation that results from collapse of an electric dipole. The analytically describable radiation field pulse of CDM can be readily produced with a new instrument (CDM Event Simulator or CDMES) that creates dipole collapse at will. A coaxial monopole E-field antenna’s transfer function gives the antenna signal in near-field, and experiments compare well with theory. These and other instruments for CDM ESD monitoring and process control are described in a newly-issued patent, reviewed here.

Biography

Timothy J. Maloney received an S.B. degree in physics from the Massachusetts Institute of Technology in 1971, an M.S. in physics from Cornell University in 1973, and a Ph.D. in electrical engineering from Cornell in 1976, where he was a National Science Foundation Fellow. He was a Postdoctoral Associate at Cornell until 1977, when he joined the Central Research Laboratory of Varian Associates, Palo Alto, CA. At Varian until 1984, he worked on III-V semiconductor photocathodes, solar cells and microwave devices, as well as silicon molecular beam epitaxy and MOS process technology. Since 1984 he was with Intel Corp., Santa Clara, CA, where he was concerned with integrated circuit electrostatic discharge (ESD) protection, CMOS latchup testing, fab process reliability, signal integrity, system ESD testing, and design and testing of standard IC layouts. He was a Senior Principal Engineer at Intel from 1999 until retirement in June of 2016. He received the Intel Achievement Award for his patented ESD protection devices, which have achieved breakthrough ESD performance enhancements for a wide variety of Intel products. He now holds forty patents. Dr. Maloney received Best Paper/Outstanding Paper Awards for his contributions to the EOS/ESD Symposium in 1986, 1990, and 2015, was General Chairman for the 1992 EOS/ESD Symposium, and received the ESD Association's Outstanding Contributions Award in 1995. He has taught short courses at UCLA, University of Wisconsin, and UC Berkeley. He is co-author of a book, "Basic ESD and I/O Design" (Wiley, 1998), and is a Fellow of the IEEE. Dr. Maloney’s ESD publication web site can be found at this location.